Foothill Instruments

Film thickness metrology systems

• Current Windows operating system for reliability and ease of networking within fab
• Password login for production, semi-auto, engineer, and maintenance modes

Automatically measure multiple sites on wafer One button RUN generates thickness results with statistics Alerts may be defined for thickness and fit out of range condition Advanced Wafermap® software for mapping and statistical process control (SPC)

  Semi-auto mode

Allow mapping with manual positioning

  Engineer mode

	Manual site measurement Pattern and film editors for production program definition Sophisticated editor generates grid, ring, line, or custom patterns Absolute reflectivity measurements Export reflectivity and model data to text files Maintenance functions

Wafermap ©  Boin-GmbH