Foothill Instruments
Film thickness metrology systems


  Engineer Mode Menus
 

System: * Available in all modes
Wafer Size set wafer size or type
Print thickness tabular data or reflectivity graphics
Help
About
Log off enter operator, engineer, or maintenance mode by password
 
File:  
Save Data save measured reflectivity
Save Raw Data save detector data
Exit
 
Editors:  
Program materials and parameters to measure
Pattern coordinates of measurement locations
Material refractive index data of material
System Config set configurable parameters
 
Stage:  
Move
Reset
 
Override:  
Film Type select new material to manually measure
Substrate Type select new substrate material
Reflectivity select low/mid/high to set system gain
 
Advanced:  
Reference
Zero
Measure Reflectivity
Raw Scan
Calculate Model
 

 


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