System: |
* Available in all modes |
Wafer Size |
set wafer size or type |
Print |
thickness tabular data or reflectivity graphics |
Help |
About |
Log off |
enter operator, engineer, or maintenance mode by password |
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File: |
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Save Data |
save measured reflectivity |
Save Raw Data |
save detector data |
Exit |
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Editors: |
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Program |
materials and parameters to measure |
Pattern |
coordinates of measurement locations |
Material |
refractive index data of material |
System Config |
set configurable parameters |
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Stage: |
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Move |
Reset |
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Override: |
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Film Type |
select new material to manually measure |
Substrate Type |
select new substrate material |
Reflectivity |
select low/mid/high to set system gain |
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Advanced: |
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Reference |
Zero |
Measure Reflectivity |
Raw Scan |
Calculate Model |
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