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KV-300 Specifications

  • Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
  • Substrate materials: Si, glass, GaAs, metals, etc.
  • Multi-layer measurements
  • Absolute reflectivity measurements
  • Footprint of 0.75 m deep x 0.9 m wide (with PC)
 
Thickness measurement range: 0.08 - 200 µm (configuration /A)
0.2 - 350 µm (/B)
0.5 - 500 µm (/C)
0.04 - 60 µm (/D)
0.04 - 130 µm (/Dx)
Short-term repeatability: 1 < 1 nm typical
Long-term repeatability: 2 < 1 nm
Measurement spot size: 13 x 50 µm, 25 µm dia. for /D and /Dx
Stage life: > 100 km of travel
Lamp life: > 5000 hours

 
Notes: 1  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
2  1 sigma of daily average of short-term repeatability over 30 days

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